Samsung Orders Multiple SACVD Systems from Applied Materials; More Than 500 Applied Materials` SACVD Systems Installed at Customer Sites Worldwide
SANTA CLARA, Calif.--(BUSINESS WIRE)--April 6, 1999--Applied Materials, Inc., the leading global supplier of chemical vapor deposition (CVD) systems, has received a multiple-system order for its Giga-Fill(TM) Sub-Atmospheric SACVD(TM) Centura(R) from Samsung Electronics Co. Samsung will use the systems in a new fab expansion to deposit undoped silicate glass (USG) and borophosphosilicate glass (BPSG) dielectric films for shallow trench isolation (STI) and premetal dielectric (PMD) gap-fill applications.
"Applied Materials is committed to providing Samsung with the
support it needs in meeting its fab requirements," said Dr. Farhad
Moghadam, vice president and general manager of the Applied Materials'
Dielectric Deposition Products Division. "Our SACVD technology has
played a key role in enabling the semiconductor industry to move into
deep submicron geometries. These systems are also known for their
robust operation at elevated temperatures, high uptime with long runs
between chamber cleans, and excellent film uniformity and quality. We
are very pleased that customers like Samsung have recognized Giga-Fill
SACVD as a highly production-worthy technology."
Applied Materials has an installed base of more than 500 SACVD
systems at customer sites worldwide, many of which are being used for
advanced STI, PMD, and intermetal dielectric (IMD) applications. The
company's leading SACVD technology is the Giga-Fill SACVD Centura.
This is the only TEOS/Ozone system with extendibility down to sub-0.18
micron generations to demonstrate greater than 10,000 mean wafers
between cleans (MWBC) and to consistently operate with uptimes greater
than 90 percent.
The market for atmospheric pressure and sub-atmospheric pressure
CVD (APCVD and SACVD) equipment was estimated by market researcher
Dataquest at $429 million in 1998, with growth projected to $748
million by 2003. Dataquest estimated the market for all dielectric CVD
systems at $1,236 million in 1998, growing to $2,204 million by 2003.
Applied Materials' SACVD systems are currently being used by all of
the top 25 semiconductor manufacturers worldwide for STI, PMD and
intermetal dielectric applications.
Applied Materials, Inc. is a Fortune 500 global growth company
and the world's largest supplier of wafer fabrication systems and
services to the global semiconductor industry. Applied Materials is
traded on the Nasdaq National Market System under the symbol "AMAT."
Applied Materials' web site is www.appliedmaterials.com.
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CONTACT: Applied Materials, Inc.
Betty Newboe, 408/563-0647 (editorial/media)
or
Carolyn Schwartz, 408/748-5227 (financial community)
KEYWORD: CALIFORNIA
INDUSTRY KEYWORD: COMPUTERS/ELECTRONICS COMED