Applied Materials Forum Spotlights ``Navigating the Next Interconnect Frontier'' At IITC
SANTA CLARA, Calif., Jun 02, 2005 (BUSINESS WIRE) -- Applied Materials, Inc. (Nasdaq:AMAT) today announced that it is hosting a forum on Monday, June 6 in Burlingame, Calif., in conjunction with the 2005 IEEE International Interconnect Technology Conference (IITC). The forum will examine projected risks, roadblocks and opportunities as well as share knowledge on engineering manufacturable interconnect structures for 45nm and below devices, a major challenge for the semiconductor industry.
Industry leaders will explore the integration and packaging of porous low k materials, metallization resistivity and reliability challenges, maintaining low k integrity during etch, and the detection of systematic and "buried" defects.
Panel: Moderator, Professor Scott Thompson, University of Florida
Dr. Paul Besser, Fellow, AMD
Dr. Bob Wisnieff, Senior Integration Manager, IBM Corporation
Dr. C. H. Jan, Senior BEOL Program Manager, Intel Corporation
Dr. John Chen, Vice President, Advanced Technology
Engineering, Nvidia
Dr. Douglas Yu, Senior Director, Advanced Module Technology,
TSMC
Dr. Farhad Moghadam, Senior Vice President, Thin Films Group,
Applied Materials
Why: As interconnect dimensions shrink to the 45nm node, scaling
alone cannot provide the required performance benefits. Low k
dielectric films that reduce line-to-line capacitance and
allow interconnects to be built closer together with less risk
of electrical signal leakage must be advanced to a k-effective
of 2.5. Rising resistivity of the thin copper lines must be
addressed to maintain device performance and reliability. The
need for advanced barrier and gap-fill solutions is critical
to reduce resistivity and eliminate voiding, and improved
inspection techniques capable of finding systematic defects
are also required. All these are new and significant process
issues that the industry must work together to understand and
resolve.
When: Monday, June 6, 2005, from 5:00 p.m. to 7:30 p.m. PDT
Where: Hyatt Regency Hotel, 1333 Bayshore Highway, Burlingame
Agenda: 5:00 p.m. - 6:00 p.m. Registration and reception
6:00 p.m. - 7:30 p.m. Panel discussion, Q&A
For the complete program and to register for this event,
visit: https://programs.regweb.com/amat/IITC05/
Applied Materials, Inc. (Nasdaq:AMAT), headquartered in Santa Clara, California, is the largest supplier of equipment and services to the global semiconductor industry. Applied Materials' web site is www.appliedmaterials.com.
SOURCE: Applied Materials, Inc.
Applied Materials, Inc.
Connie Duncan, 408-563-6209